Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7277172 | Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals | Daniel Kandel, Kenneth P. Gross, Michael Friedmann, Jiyou Fu, Boris Golovanevsky | 2007-10-02 |