Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11913874 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Gregory Brady +1 more | 2024-02-27 |
| 11119050 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, David Y. Wang, Alexander Buettner, Kerstin Purrucker | 2021-09-14 |
| 10969328 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Gregory Brady +1 more | 2021-04-06 |
| 10690602 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, David Y. Wang, Alexander Buettner, Kerstin Purrucker | 2020-06-23 |
| 10648796 | Optical metrology with small illumination spot size | Noam Sapiens, Alexander Buettner, Kerstin Purrucker, Andrei V. Shchegrov | 2020-05-12 |
| 10612916 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Thaddeus Gerard Dziura, Noam Sapiens, Stilian Ivanov Pandev | 2020-04-07 |
| 10438825 | Spectral reflectometry for in-situ process monitoring and control | Prateek Jain, Daniel Wack, Andrei V. Shchegrov, Shankar Krishnan | 2019-10-08 |
| 10234271 | Method and system for spectroscopic beam profile metrology including a detection of collected light according to wavelength along a third dimension of a hyperspectral detector | Jiyou Fu, Noam Sapiens, Stilian Ivanov Pandev | 2019-03-19 |
| 10215688 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Gregory Brady +1 more | 2019-02-26 |
| 10101676 | Spectroscopic beam profile overlay metrology | Jiyou Fu, Noam Sapiens, Stilian Ivanov Pandev | 2018-10-16 |
| 10072921 | Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element | Jiyou Fu, Noam Sapiens, Stilian Ivanov Pandev | 2018-09-11 |
| 9915524 | Optical metrology with small illumination spot size | Noam Sapiens, Alexander Buettner, Kerstin Purrucker, Andrei V. Shchegrov | 2018-03-13 |
| 9816810 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Thaddeus Gerard Dziura, Noam Sapiens, Stilian Ivanov Pandev | 2017-11-14 |
| 9778213 | Metrology tool with combined XRF and SAXS capabilities | Michael S. Bakeman, Andrei V. Shchegrov, Thaddeus Gerard Dziura | 2017-10-03 |
| 9574992 | Single wavelength ellipsometry with improved spot size capability | Esen Salcin, Fuming Wang, Hidong Kwak, Damon F. Kvamme, Uri Greenberg +1 more | 2017-02-21 |
| 9535018 | Combined x-ray and optical metrology | Andrei V. Shchegrov, Michael S. Bakeman, Thaddeus Gerard Dziura | 2017-01-03 |
| 9490182 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Thaddeus Gerard Dziura, Noam Sapiens, Stilian Ivanov Pandev | 2016-11-08 |
| 9400246 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Gregory Brady +1 more | 2016-07-26 |
| 9291554 | Method of electromagnetic modeling of finite structures and finite illumination for metrology and inspection | Alexander Kuznetsov, Andrei V. Shchegrov, Leonid Poslavsky, Xuefeng Liu | 2016-03-22 |
| 9243886 | Optical metrology of periodic targets in presence of multiple diffraction orders | Alexander Kuznetsov, Andrei V. Shchegrov | 2016-01-26 |
| 9228943 | Dynamically adjustable semiconductor metrology system | David Y. Wang, Guorong V. Zhuang, Johannes D. de Veer, Shankar Krishnan | 2016-01-05 |
| 8982358 | Apparatus and method of measuring roughness and other parameters of a structure | Andrei V. Shchegrov, Gregory Brady | 2015-03-17 |