Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12013355 | Methods and systems for compact, small spot size soft x-ray scatterometry | David Y. Wang, Michael Friedmann | 2024-06-18 |
| 11119050 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, David Y. Wang, Alexander Buettner, Kevin Peterlinz | 2021-09-14 |
| 10690602 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, David Y. Wang, Alexander Buettner, Kevin Peterlinz | 2020-06-23 |
| 10648796 | Optical metrology with small illumination spot size | Noam Sapiens, Kevin Peterlinz, Alexander Buettner, Andrei V. Shchegrov | 2020-05-12 |
| 9921104 | Simultaneous multi-angle spectroscopy | Shankar Krishnan, Alexander Buettner, David Y. Wang | 2018-03-20 |
| 9915524 | Optical metrology with small illumination spot size | Noam Sapiens, Kevin Peterlinz, Alexander Buettner, Andrei V. Shchegrov | 2018-03-13 |