| 11428650 |
Computationally efficient x-ray based overlay measurement |
John J. Hench, Andrei V. Shchegrov |
2022-08-30 |
| 10801975 |
Metrology tool with combined X-ray and optical scatterometers |
Andrei V. Shchegrov |
2020-10-13 |
| 10545104 |
Computationally efficient X-ray based overlay measurement |
John J. Hench, Andrei V. Shchegrov |
2020-01-28 |
| 10324050 |
Measurement system optimization for X-ray based metrology |
John J. Hench, Andrei V. Shchegrov |
2019-06-18 |
| 10013518 |
Model building and analysis engine for combined X-ray and optical metrology |
Andrei V. Shchegrov, Qiang Zhao, Zhengquan Tan |
2018-07-03 |
| 10012606 |
X-ray based metrology with primary and secondary illumination sources |
Xuena Zhang |
2018-07-03 |
| 10006865 |
Confined illumination for small spot size metrology |
Derrick Shaughnessy, Guorong V. Zhuang, Andrei V. Shchegrov, Leonid Poslavsky |
2018-06-26 |
| 9885962 |
Methods and apparatus for measuring semiconductor device overlay using X-ray metrology |
Andrei Veldman, Andrei V. Shchegrov, Walter D. Mieher |
2018-02-06 |
| 9846132 |
Small-angle scattering X-ray metrology systems and methods |
Andrei V. Shchegrov, Ady Levy, Guorong V. Zhuang, John J. Hench |
2017-12-19 |
| 9826614 |
Compac X-ray source for semiconductor metrology |
Andrei V. Shchegrov |
2017-11-21 |
| 9778213 |
Metrology tool with combined XRF and SAXS capabilities |
Andrei V. Shchegrov, Kevin Peterlinz, Thaddeus Gerard Dziura |
2017-10-03 |
| 9719932 |
Confined illumination for small spot size metrology |
Derrick Shaughnessy, Guorong V. Zhuang, Andrei V. Shchegrov, Leonid Poslavsky |
2017-08-01 |
| 9693439 |
High brightness liquid droplet X-ray source for semiconductor metrology |
Guorong V. Zhuang, Andrei V. Shchegrov, Jonathan M. Madsen |
2017-06-27 |
| 9535018 |
Combined x-ray and optical metrology |
Kevin Peterlinz, Andrei V. Shchegrov, Thaddeus Gerard Dziura |
2017-01-03 |
| 9494535 |
Scatterometry-based imaging and critical dimension metrology |
Abdurrahman Sezginer, John J. Hench |
2016-11-15 |
| 8879073 |
Optical metrology using targets with field enhancement elements |
Jonathan M. Madsen, Andrei V. Shchegrov, Thaddeus Gerard Dziura, Alexander Kuznetsov, Bin-Ming Benjamin Tsai |
2014-11-04 |