Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12335649 | Methods and systems for signal sampling using spatial dispersion and photonics assistance | Esko Mikkola | 2025-06-17 |
| 10804167 | Methods and systems for co-located metrology | David Y. Wang, Michael Friedmann, Derrick Shaughnessy, Andrei V. Shchegrov, Jonathan M. Madsen +1 more | 2020-10-13 |
| 9574992 | Single wavelength ellipsometry with improved spot size capability | Fuming Wang, Kevin Peterlinz, Hidong Kwak, Damon F. Kvamme, Uri Greenberg +1 more | 2017-02-21 |