| 11796390 |
Bandgap measurements of patterned film stacks using spectroscopic metrology |
Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more |
2023-10-24 |
| 11378451 |
Bandgap measurements of patterned film stacks using spectroscopic metrology |
Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more |
2022-07-05 |
| 10190868 |
Metrology system, method, and computer program product employing automatic transitioning between utilizing a library and utilizing regression for measurement processing |
Liequan Lee, Raphael Jean Michel Marie Getin, Meng Cao, Leonid Poslavsky, Hong Qiu |
2019-01-29 |
| 10088413 |
Spectral matching based calibration |
Hidong Kwak, Zhiming Jiang, Ward Dixon, Kenneth Edward James, Jr., Leonid Poslavsky |
2018-10-02 |
| 9625823 |
Calculation method for local film stress measurements using local film thickness values |
Leonid Poslavsky, Yu Tay |
2017-04-18 |
| 9553033 |
Semiconductor device models including re-usable sub-structures |
Jonathan Iloreta, Matthew A. Laffin, Leonid Poslavsky, Qiang Zhao, Lie-Quan Lee |
2017-01-24 |
| 9442063 |
Measurement of composition for thin films |
Ming Di, Qiang Zhao, Xiang Gao, Leonid Poslavsky |
2016-09-13 |
| 9110020 |
Atmospheric molecular contamination control with local purging |
Hidong Kwak, Ward Dixon, Ning Wang, Jagjit Sandhu |
2015-08-18 |
| 9046474 |
Multi-analyzer angle spectroscopic ellipsometry |
Hidong Kwak, Ward Dixon, Leonid Poslavsky |
2015-06-02 |
| 8830486 |
Atmospheric molecular contamination control with local purging |
Hidong Kwak, Ward Dixon, Ning Wang, Jagjit Sandhu |
2014-09-09 |
| 8711349 |
High throughput thin film characterization and defect detection |
Xiang Gao, Philip D. Flanner, III, Leonid Poslavsky, Zhiming Jiang, Jun YE +1 more |
2014-04-29 |
| 7903250 |
Control by sample reflectivity |
Fabio A. Faccini, Jiyou Fu, Zhiming Jiang |
2011-03-08 |
| 7453562 |
Ellipsometry measurement and analysis |
Shankar Krishnan, Fabio A. Faccini |
2008-11-18 |
| 7349079 |
Methods for measurement or analysis of a nitrogen concentration of a specimen |
Qiang Zhao, Sungchul Yoo, Zhengquan Tan |
2008-03-25 |