Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11562289 | Loosely-coupled inspection and metrology system for high-volume production process monitoring | Song Wu, Yin Xu, Andrei V. Shchegrov, Pablo I. Rovira, Jonathan M. Madsen | 2023-01-24 |
| 11175589 | Automatic wavelength or angle pruning for optical metrology | Leonid Poslavsky | 2021-11-16 |
| 10895810 | Automatic selection of sample values for optical metrology | Meng Cao, Leonid Poslavsky, Inkyo Kim | 2021-01-19 |
| 10732520 | Measurement library optimization in semiconductor metrology | Meng Cao, Qiang Zhao, Heyin Li, Mengmeng Ye | 2020-08-04 |
| 10502692 | Automated metrology system selection | Meng Cao, Qiang Zhao, Heyin Li, Mengmeng Ye | 2019-12-10 |
| 10386729 | Dynamic removal of correlation of highly correlated parameters for optical metrology | Leonid Poslavsky, Stilian Ivanov Pandev | 2019-08-20 |
| 10345721 | Measurement library optimization in semiconductor metrology | Meng Cao, Qiang Zhao, Heyin Li, Mengmeng Ye | 2019-07-09 |
| 10255385 | Model optimization approach based on spectral sensitivity | Stilian Ivanov Pandev, Thaddeus Gerard Dziura, Meng-Fu Shih | 2019-04-09 |
| 9607265 | Accurate and fast neural network training for library-based critical dimension (CD) metrology | Wen Jin, Vi Vuong, Junwei Bao, Leonid Poslavsky | 2017-03-28 |
| 9553033 | Semiconductor device models including re-usable sub-structures | Jonathan Iloreta, Matthew A. Laffin, Leonid Poslavsky, Torsten R. Kaack, Qiang Zhao | 2017-01-24 |
| 9347872 | Meta-model based measurement refinement | Leonid Poslavsky | 2016-05-24 |
| 8577820 | Accurate and fast neural network training for library-based critical dimension (CD) metrology | Wen Jin, Vi Vuong, Junwei Bao, Leonid Poslavsky | 2013-11-05 |