Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11231362 | Multi-environment polarized infrared reflectometer for semiconductor metrology | Guorong V. Zhuang, Shankar Krishnan, David Y. Wang, Xuefeng Liu, Dawei Hu | 2022-01-25 |
| 10763146 | Recipe optimization based zonal analysis | Roie Volkovich, Michael Adel, Liran Yerushalmi, Eitan Herzel, Eran Amit | 2020-09-01 |
| 10732520 | Measurement library optimization in semiconductor metrology | Meng Cao, Lie-Quan Lee, Qiang Zhao, Heyin Li | 2020-08-04 |
| 10502692 | Automated metrology system selection | Meng Cao, Lie-Quan Lee, Qiang Zhao, Heyin Li | 2019-12-10 |
| 10345721 | Measurement library optimization in semiconductor metrology | Meng Cao, Lie-Quan Lee, Qiang Zhao, Heyin Li | 2019-07-09 |