Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10079183 | Calculated electrical performance metrics for process monitoring and yield management | Xiang Gao, Leonid Poslavsky, Ming Di, Qiang Zhao, Scott Penner | 2018-09-18 |
| 9127927 | Techniques for optimized scatterometry | Jonathan Iloreta, Paul Aoyagi, Hanyou Chu, Jeffrey A. Chard, Peilin Jiang +2 more | 2015-09-08 |
| 8711349 | High throughput thin film characterization and defect detection | Xiang Gao, Leonid Poslavsky, Zhiming Jiang, Jun YE, Torsten R. Kaack +1 more | 2014-04-29 |
| 7362686 | Film measurement using reflectance computation | Paul Aoyagi, Leonid Poslavsky | 2008-04-22 |
| 7345761 | Film measurement | Paul Aoyagi, Leonid Poslavsky | 2008-03-18 |
| 7190453 | Film measurement | Paul Aoyagi, Leonid Poslavsky | 2007-03-13 |
| 5581350 | Method and system for calibrating an ellipsometer | Xing Chen, Kiron Balkrishna Malwankar, Jennming Chen | 1996-12-03 |
| 4538203 | Passive mass-spring type of sensing device having electronic damping | Harold D. Morris, Gerald R. Newell | 1985-08-27 |