Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11669667 | Automatic test pattern generation (ATPG) for parametric faults | Mayukh Bhattacharya, Chih Ping Antony Fan | 2023-06-06 |
| 11067389 | Overlay metrology system and method | Yung-Ho Alex Chuang, Yinying Xiao-Li, John Fielden, Xuefeng Liu | 2021-07-20 |
| 9915522 | Optimized spatial modeling for optical CD metrology | Leonid Poslavsky | 2018-03-13 |
| 9127927 | Techniques for optimized scatterometry | Jonathan Iloreta, Paul Aoyagi, Hanyou Chu, Jeffrey A. Chard, Mikhail Sushchik +2 more | 2015-09-08 |
| 8762100 | Numerical aperture integration for optical critical dimension (OCD) metrology | Hanyou Chu, Joerg Bischoff | 2014-06-24 |
| 8670948 | Numerical aperture integration for optical critical dimension (OCD) metrology | Hanyou Chu | 2014-03-11 |