Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9164397 | Optics symmetrization for metrology | Amnon Manassen, Daniel Kandel, Joel Seligson, Alexander Svizher, Guy M. Cohen +4 more | 2015-10-20 |
| 8582114 | Overlay metrology by pupil phase analysis | Amnon Manassen, Daniel Kandel, Vladimir Levinski, Noam Sapiens, Joel Seligson +4 more | 2013-11-12 |
| 7242477 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +4 more | 2007-07-10 |