Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11874605 | Verification metrology targets and their design | Michael Adel, Shiming Wei, Mark Ghinovker | 2024-01-16 |
| 11467503 | Field-to-field corrections using overlay targets | Enna Leshinsky-Altshuller, Mark Ghinovker, Diana Shaphirov, Guy Ben Dov, Roie Volkovich +1 more | 2022-10-11 |
| 11137692 | Metrology targets and methods with oblique periodic structures | Yoel Feler, Mark Ghinovker, Alexander Svizher, Vladimir Levinski | 2021-10-05 |
| 10990022 | Field-to-field corrections using overlay targets | Enna Leshinsky-Altshuller, Mark Ghinovker, Diana Shaphirov, Guy Ben Dov, Roie Volkovich +1 more | 2021-04-27 |
| 10705434 | Verification metrology target and their design | Michael Adel, Jeremy (Shi-Ming) Wei, Mark Ghinovker | 2020-07-07 |
| 10242290 | Method, system, and user interface for metrology target characterization | Yoel Feler, Anat Marchelli, Berta Dinu, Vladimir Levinski, Boris Efraty +4 more | 2019-03-26 |