Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Device metrology targets and methods

Device metrology targets and methods

US Patent 10571811 · Granted Feb 25, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Image denoising for examination of a semiconductor specimen2025
Shape localization for examining a semiconductor specimen2025
Inter-step feedforward process control in the manufacture of semiconductor devic2025
Method for measuring and correcting misregistration between layers in a semicond2025
Metrology and process control for semiconductor manufacturing2025
Systems and methods for improved metrology for semiconductor device wafers2024
Metrology target design for tilted device designs2024
Metrology target design for tilted device designs2024
Reducing device overlay errors2024
Self-calibrating overlay metrology2024
Accuracy improvements in optical metrology2024
Measurement of overlay error using device inspection system2023