Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405226 | Substrate inspection apparatus and substrate inspection method | Jangwoon Sung, Lei Tian, Hao Wang, Jiabei Zhu, Wookrae Kim +3 more | 2025-09-02 |
| 12347096 | Semiconductor measurement apparatus | Jinseob Kim, Wookrae Kim, Jinyong Kim, Jaehwang Jung, Sungho Jang | 2025-07-01 |
| 12307650 | Scanning electron microscope device, semiconductor manufacturing device, and method of controlling semiconductor manufacturing device | Yunje Cho, Subong SHON, Taehyoung Lee, Yeny YIM | 2025-05-20 |
| 12228499 | Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method | Jaehwang Jung, Yasuhiro Hidaka, Mitsunori Numata, Wookrae Kim, Jinseob Kim | 2025-02-18 |
| 12222282 | Semiconductor measurement apparatus | Seoyeon Jeong, Seungwoo Lee, Inho Andy Shin, Wookrae Kim, Jaehwang Jung | 2025-02-11 |
| 12117347 | Metrology target design for tilted device designs | Mark D. Smith, Michael Adel, Eran Amit, Daniel Kandel | 2024-10-15 |
| 12045009 | Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM | Wookrae Kim, Gwangsik Park, Changhoon Choi | 2024-07-23 |
| 12038718 | Holographic microscope and manufacturing method of semiconductor device using the same | Seungbeom Park, Sungmin PARK, Jaehyeon Son, Heejun Ahn | 2024-07-16 |
| 12002698 | Metrology apparatus and method based on diffraction using oblique illumination and method of manufacturing semiconductor device using the metrology method | Changhyeong YOON, Wookrae Kim, Jaehwang Jung, Jinseob Kim | 2024-06-04 |
| 11988495 | Through-focus image-based metrology device, operation method thereof, and computing device for executing the operation | Kwangsoo Kim, Sungyoon Ryu, Daejun Park, Seong Jin YUN, Seungryeol Oh +4 more | 2024-05-21 |
| 11972960 | Imaging ellipsometry (IE)-based inspection method and method of fabricating semiconductor device by using IE-based inspection method | Wookrae Kim, Jaehwang Jung, Myoungki Ahn | 2024-04-30 |
| 11726046 | Multi-scale spectral imaging apparatuses and methods, and methods of manufacturing semiconductor devices by using the imaging methods | Jaehwang Jung, Hyejin Shin, Wookrae Kim, Gwangsik Park, Yongju Jeon | 2023-08-15 |
| 11604136 | Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method | Jaehwang Jung, Yasuhiro Hidaka, Mitsunori Numata, Wookrae Kim, Jinseob Kim | 2023-03-14 |
| 11428947 | Super-resolution holographic microscope | Seungbeom Park, Jaehyeon Son, Jaehwang Jung, Taewan Kim, Kyungwon Yun | 2022-08-30 |
| 11314205 | Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM | Wookrae Kim, Gwangsik Park, Changhoon Choi | 2022-04-26 |
| 11275034 | Inspection apparatus and method based on coherent diffraction imaging (CDI) | Kyungwon Yun, Taewan Kim, Seungbeom Park, Jaehyeon Son, Jaehwang Jung | 2022-03-15 |
| 10685165 | Metrology using overlay and yield critical patterns | Daniel Kandel, Mark D. Smith, Mark Wagner, Eran Amit | 2020-06-16 |
| 10579768 | Process compatibility improvement by fill factor modulation | Vladimir Levinski, Eitan Hajaj, Tal Itzkovich, Sharon Aharon, Michael Adel +5 more | 2020-03-03 |
| 10216096 | Process-sensitive metrology systems and methods | Mark D. Smith, Sanjay Kapasi, Stilian Ivanov Pandev, Dzmitry Sanko, Pradeep Subrahmanyan +1 more | 2019-02-26 |
| 10209627 | Systems and methods for focus-sensitive metrology targets | Stewart Robertson, Mark D. Smith, Pradeep Subrahmanyan | 2019-02-19 |
| 10095122 | Systems and methods for fabricating metrology targets with sub-resolution features | Mark D. Smith | 2018-10-09 |
| 10018919 | System and method for fabricating metrology targets oriented with an angle rotated with respect to device features | Mark D. Smith | 2018-07-10 |
| 9466604 | Metal segments as landing pads and local interconnects in an IC device | Youngtag Woo, Ryan Ryoung-Han Kim, Jongwook Kye | 2016-10-11 |
| 9419268 | Secondary battery and circuit board assembly suitable for secondary battery | Seongjoon Lee | 2016-08-16 |
| 9121336 | Diesel engine piston | Dae-Young Choi, Hyunsung Jung, Minyoung Ki, Hyeungwoo Lee | 2015-09-01 |