Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12045009 | Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM | Myungjun Lee, Wookrae Kim, Changhoon Choi | 2024-07-23 |
| 11898912 | Hyperspectral imaging (HSI) apparatus and inspection apparatus including the same | Sungho Jang, Jungchul Lee, Jinseob Kim, Minhwan Seo, Janghwi Lee +3 more | 2024-02-13 |
| 11726046 | Multi-scale spectral imaging apparatuses and methods, and methods of manufacturing semiconductor devices by using the imaging methods | Jaehwang Jung, Hyejin Shin, Wookrae Kim, Myungjun Lee, Yongju Jeon | 2023-08-15 |
| 11314205 | Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM | Myungjun Lee, Wookrae Kim, Changhoon Choi | 2022-04-26 |
| 11264256 | Wafer inspection apparatus | Jaehwang Jung, Wookrae Kim, Juntaek Oh | 2022-03-01 |
| 10699927 | Inspection apparatus and semiconductor structure-manufacturing apparatus including the same | Wookrae Kim, Kwangsoo Kim | 2020-06-30 |