Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431341 | Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method | Changsoon Lim, Youngdo Kim, Daewon Kang, Chansoo Kang, Kyunghyun Kim +3 more | 2025-09-30 |
| 12422245 | Semiconductor measurement apparatus | Garam Choi, Wookrae Kim, Jinseob Kim, Jinyong Kim, Younguk JIN +1 more | 2025-09-23 |
| 12347096 | Semiconductor measurement apparatus | Myungjun Lee, Jinseob Kim, Wookrae Kim, Jinyong Kim, Jaehwang Jung | 2025-07-01 |
| 12313393 | Level sensor and substrate processing apparatus including the same | Sangwoo Bae, Minhwan Seo, Jangwoon Sung, Akinori Okubo, Seungwoo Lee +3 more | 2025-05-27 |
| 11898912 | Hyperspectral imaging (HSI) apparatus and inspection apparatus including the same | Jungchul Lee, Jinseob Kim, Gwangsik Park, Minhwan Seo, Janghwi Lee +3 more | 2024-02-13 |
| 11735437 | Apparatus and method for treating substrate | Boong Kim, Oh Jin Kwon, Joo Jib Park | 2023-08-22 |
| 11676263 | Extreme ultraviolet (EUV) collector inspection apparatus and method | Dong-Hyub Lee, Kyungsik Kang, Jeong Gil Kim, Jinyong Kim, Hochul Kim +4 more | 2023-06-13 |
| 11521977 | Semiconductor memory device | Kiseok Lee, Chan Yoon, Augustin J. Hong, Keunnam Kim, Dongoh Kim +5 more | 2022-12-06 |
| 11490499 | Method of exposure using extreme ultraviolet and method of manufacturing a semiconductor device using the same | Yoonjae Kim, Hyuck Shin, Donghyub Lee, Kul Inn | 2022-11-01 |
| 11437089 | Integrated circuit devices | Taesung Kang, Youngkyu Lee, Kyoungmin Kim, Ilgweon Kim, Bokyeon Won +2 more | 2022-09-06 |
| 11016400 | Extreme ultraviolet exposure system | Sungyeol Kim, Hyuck Shin, Keunhee Bai, Injae Lee | 2021-05-25 |
| 10871396 | Optical emission spectroscopy calibration device and system including the same | Jongsu Kim, Younghwan Kim, Junbum Park, Youngjoo Lee | 2020-12-22 |
| 10732129 | Apparatus for and method of performing inspection and metrology process | Kwang Soo Kim, Youngkyu Park, Byeonghwan Jeon | 2020-08-04 |
| 10332890 | Semiconductor memory device and method of manufacturing the same | Kiseok Lee, Chan Yoon, Augustin J. Hong, Keunnam Kim, Dongoh Kim +5 more | 2019-06-25 |
| 9984902 | Apparatus and method for treating substrate | Boong Kim, Oh Jin Kwon, Joo Jib Park | 2018-05-29 |
| 9947668 | Semiconductor devices and methods of forming the same | Dongjin Lee, Jiyoung Kim, Kang-Uk Kim, Chan Min Lee, Juyeon Jang | 2018-04-17 |
| 9595315 | Semiconductor memory device compensating difference of bitline interconnection resistance | Joon Han, Won-Kyung Park, Junhee Lim | 2017-03-14 |
| 9493767 | Method for screening for high L-tryptophan producing microorganisms using riboswitch | Gyoo Yeol Jung, Jina Yang, Sang Woo Seo | 2016-11-15 |
| 9337199 | Semiconductor device and method of fabricating the same | Jiyoung Kim, Kang-Uk Kim, Kyung Eun Kim, Daeik Daniel Kim, Hyoungsub Kim +4 more | 2016-05-10 |
| 9305928 | Semiconductor devices having a silicon-germanium channel layer and methods of forming the same | Youngkuk Kim, Ho Kyun An, Jaehyun Yeo, Badro Im, Hanjin Lim +1 more | 2016-04-05 |
| 9136147 | Apparatus and method for treating substrate | Joo Jib Park, Oh Jin Kwon, Boong Kim | 2015-09-15 |