| 12431341 |
Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method |
Changsoon Lim, Youngdo Kim, Daewon Kang, Chansoo Kang, Kyunghyun Kim +3 more |
2025-09-30 |
| 12422245 |
Semiconductor measurement apparatus |
Garam Choi, Wookrae Kim, Jinseob Kim, Jinyong Kim, Younguk JIN +1 more |
2025-09-23 |
| 12347096 |
Semiconductor measurement apparatus |
Myungjun Lee, Jinseob Kim, Wookrae Kim, Jinyong Kim, Jaehwang Jung |
2025-07-01 |
| 12313393 |
Level sensor and substrate processing apparatus including the same |
Sangwoo Bae, Minhwan Seo, Jangwoon Sung, Akinori Okubo, Seungwoo Lee +3 more |
2025-05-27 |
| 11898912 |
Hyperspectral imaging (HSI) apparatus and inspection apparatus including the same |
Jungchul Lee, Jinseob Kim, Gwangsik Park, Minhwan Seo, Janghwi Lee +3 more |
2024-02-13 |
| 11735437 |
Apparatus and method for treating substrate |
Boong Kim, Oh Jin Kwon, Joo Jib Park |
2023-08-22 |
| 11676263 |
Extreme ultraviolet (EUV) collector inspection apparatus and method |
Dong-Hyub Lee, Kyungsik Kang, Jeong Gil Kim, Jinyong Kim, Hochul Kim +4 more |
2023-06-13 |
| 11521977 |
Semiconductor memory device |
Kiseok Lee, Chan Yoon, Augustin J. Hong, Keunnam Kim, Dongoh Kim +5 more |
2022-12-06 |
| 11490499 |
Method of exposure using extreme ultraviolet and method of manufacturing a semiconductor device using the same |
Yoonjae Kim, Hyuck Shin, Donghyub Lee, Kul Inn |
2022-11-01 |
| 11437089 |
Integrated circuit devices |
Taesung Kang, Youngkyu Lee, Kyoungmin Kim, Ilgweon Kim, Bokyeon Won +2 more |
2022-09-06 |
| 11016400 |
Extreme ultraviolet exposure system |
Sungyeol Kim, Hyuck Shin, Keunhee Bai, Injae Lee |
2021-05-25 |
| 10871396 |
Optical emission spectroscopy calibration device and system including the same |
Jongsu Kim, Younghwan Kim, Junbum Park, Youngjoo Lee |
2020-12-22 |
| 10732129 |
Apparatus for and method of performing inspection and metrology process |
Kwang Soo Kim, Youngkyu Park, Byeonghwan Jeon |
2020-08-04 |
| 10332890 |
Semiconductor memory device and method of manufacturing the same |
Kiseok Lee, Chan Yoon, Augustin J. Hong, Keunnam Kim, Dongoh Kim +5 more |
2019-06-25 |
| 9984902 |
Apparatus and method for treating substrate |
Boong Kim, Oh Jin Kwon, Joo Jib Park |
2018-05-29 |
| 9947668 |
Semiconductor devices and methods of forming the same |
Dongjin Lee, Jiyoung Kim, Kang-Uk Kim, Chan Min Lee, Juyeon Jang |
2018-04-17 |
| 9595315 |
Semiconductor memory device compensating difference of bitline interconnection resistance |
Joon Han, Won-Kyung Park, Junhee Lim |
2017-03-14 |
| 9493767 |
Method for screening for high L-tryptophan producing microorganisms using riboswitch |
Gyoo Yeol Jung, Jina Yang, Sang Woo Seo |
2016-11-15 |
| 9337199 |
Semiconductor device and method of fabricating the same |
Jiyoung Kim, Kang-Uk Kim, Kyung Eun Kim, Daeik Daniel Kim, Hyoungsub Kim +4 more |
2016-05-10 |
| 9305928 |
Semiconductor devices having a silicon-germanium channel layer and methods of forming the same |
Youngkuk Kim, Ho Kyun An, Jaehyun Yeo, Badro Im, Hanjin Lim +1 more |
2016-04-05 |
| 9136147 |
Apparatus and method for treating substrate |
Joo Jib Park, Oh Jin Kwon, Boong Kim |
2015-09-15 |
