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Apparatus and method for treating substrate |
Sangmin Lee, Woo Young Kim, Boong Kim |
2025-06-17 |
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Exhaust assembly, and liquid processing apparatus and substrate processing equipment including the same |
Kyung Min Kim, In Hwang Park, Hyun Jin Yang, Ji Hyeong Lee |
2025-06-03 |
| 12154796 |
Method for treating substrate |
— |
2024-11-26 |
| 11862491 |
Apparatus and method for treating substrate |
Dohyeon YOON, Jin Se PARK |
2024-01-02 |
| 11735437 |
Apparatus and method for treating substrate |
Boong Kim, Oh Jin Kwon, Sungho Jang |
2023-08-22 |
| 11443938 |
Substrate processing apparatus and substrate processing method |
Boong Kim, Woo Young Kim |
2022-09-13 |
| 11367635 |
Apparatus and method for treating substrate |
Sangmin Lee, Woo Young Kim, Boong Kim |
2022-06-21 |
| 10529594 |
Apparatus and method for treating substrate |
Do Youn LIM, Joonho Won, Kisang Eum, Boong Kim |
2020-01-07 |
| 10197333 |
Method and apparatus for drying substrate |
Boong Kim, Min Sung Han, Woo Young Kim |
2019-02-05 |
| 9984902 |
Apparatus and method for treating substrate |
Boong Kim, Oh Jin Kwon, Sungho Jang |
2018-05-29 |
| 9136147 |
Apparatus and method for treating substrate |
Oh Jin Kwon, Sungho Jang, Boong Kim |
2015-09-15 |
| 8211269 |
Wafer spin chuck and an etcher using the same |
Woo Young Kim, Woo-Seok Lee |
2012-07-03 |
| 8007634 |
Wafer spin chuck and an etcher using the same |
Woo Young Kim, Woo-Seok Lee |
2011-08-30 |
| 7316537 |
Substrate transport apparatus |
Jeong Yeol Choi |
2008-01-08 |