Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12055866 | Cleaning jig, substrate treating apparatus including the same, cleaning method of substrate treating apparatus | Chang Suk OH, Sang Eun NOH | 2024-08-06 |
| 10930538 | Substrate alignment apparatus, substrate processing apparatus, and substrate processing method | Cheolmin Chol, Nam Ki HONG | 2021-02-23 |
| 10529594 | Apparatus and method for treating substrate | Do Youn LIM, Joonho Won, Boong Kim, Joo Jib Park | 2020-01-07 |
| 10153137 | Support unit, substrate treating apparatus including the same, and method for treating a substrate | Seok-Won Hwang, Sun Wook JUNG | 2018-12-11 |