Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11965597 | Piston assembly, air cylinder and apparatus for processing substrate | Sung Hun EOM | 2024-04-23 |
| 10930538 | Substrate alignment apparatus, substrate processing apparatus, and substrate processing method | Kisang Eum, Cheolmin Chol | 2021-02-23 |