Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422245 | Semiconductor measurement apparatus | Garam Choi, Jinseob Kim, Jinyong Kim, Sungho Jang, Younguk JIN +1 more | 2025-09-23 |
| 12405226 | Substrate inspection apparatus and substrate inspection method | Jangwoon Sung, Lei Tian, Hao Wang, Jiabei Zhu, Myungjun Lee +3 more | 2025-09-02 |
| 12347096 | Semiconductor measurement apparatus | Myungjun Lee, Jinseob Kim, Jinyong Kim, Jaehwang Jung, Sungho Jang | 2025-07-01 |
| 12228499 | Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method | Jaehwang Jung, Yasuhiro Hidaka, Mitsunori Numata, Jinseob Kim, Myungjun Lee | 2025-02-18 |
| 12222282 | Semiconductor measurement apparatus | Seoyeon Jeong, Seungwoo Lee, Inho Andy Shin, Myungjun Lee, Jaehwang Jung | 2025-02-11 |
| 12045009 | Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM | Myungjun Lee, Gwangsik Park, Changhoon Choi | 2024-07-23 |
| 12002698 | Metrology apparatus and method based on diffraction using oblique illumination and method of manufacturing semiconductor device using the metrology method | Myungjun Lee, Changhyeong YOON, Jaehwang Jung, Jinseob Kim | 2024-06-04 |
| 11972960 | Imaging ellipsometry (IE)-based inspection method and method of fabricating semiconductor device by using IE-based inspection method | Myungjun Lee, Jaehwang Jung, Myoungki Ahn | 2024-04-30 |
| 11726046 | Multi-scale spectral imaging apparatuses and methods, and methods of manufacturing semiconductor devices by using the imaging methods | Jaehwang Jung, Hyejin Shin, Gwangsik Park, Myungjun Lee, Yongju Jeon | 2023-08-15 |
| 11624699 | Measurement system capable of adjusting AOI, AOI spread and azimuth of incident light | Jaehwang Jung, Myoungki Ahn, Changhyeong YOON | 2023-04-11 |
| 11604136 | Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method | Jaehwang Jung, Yasuhiro Hidaka, Mitsunori Numata, Jinseob Kim, Myungjun Lee | 2023-03-14 |
| 11314205 | Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM | Myungjun Lee, Gwangsik Park, Changhoon Choi | 2022-04-26 |
| 11264256 | Wafer inspection apparatus | Jaehwang Jung, Gwangsik Park, Juntaek Oh | 2022-03-01 |
| 10699927 | Inspection apparatus and semiconductor structure-manufacturing apparatus including the same | Kwangsoo Kim, Gwangsik Park | 2020-06-30 |