Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347096 | Semiconductor measurement apparatus | Myungjun Lee, Jinseob Kim, Wookrae Kim, Jinyong Kim, Sungho Jang | 2025-07-01 |
| 12313393 | Level sensor and substrate processing apparatus including the same | Sungho Jang, Sangwoo Bae, Minhwan Seo, Jangwoon Sung, Akinori Okubo +3 more | 2025-05-27 |
| 12228499 | Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method | Yasuhiro Hidaka, Mitsunori Numata, Wookrae Kim, Jinseob Kim, Myungjun Lee | 2025-02-18 |
| 12222282 | Semiconductor measurement apparatus | Seoyeon Jeong, Seungwoo Lee, Inho Andy Shin, Wookrae Kim, Myungjun Lee | 2025-02-11 |
| 12124698 | Computer system for hybrid of epoch- and pointer-based memory reclamation, and method thereof | Jeehoon Kang | 2024-10-22 |
| 12002698 | Metrology apparatus and method based on diffraction using oblique illumination and method of manufacturing semiconductor device using the metrology method | Myungjun Lee, Changhyeong YOON, Wookrae Kim, Jinseob Kim | 2024-06-04 |
| 11972960 | Imaging ellipsometry (IE)-based inspection method and method of fabricating semiconductor device by using IE-based inspection method | Myungjun Lee, Wookrae Kim, Myoungki Ahn | 2024-04-30 |
| 11726046 | Multi-scale spectral imaging apparatuses and methods, and methods of manufacturing semiconductor devices by using the imaging methods | Hyejin Shin, Wookrae Kim, Gwangsik Park, Myungjun Lee, Yongju Jeon | 2023-08-15 |
| 11624699 | Measurement system capable of adjusting AOI, AOI spread and azimuth of incident light | Wookrae Kim, Myoungki Ahn, Changhyeong YOON | 2023-04-11 |
| 11604136 | Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method | Yasuhiro Hidaka, Mitsunori Numata, Wookrae Kim, Jinseob Kim, Myungjun Lee | 2023-03-14 |
| 11428947 | Super-resolution holographic microscope | Myungjun Lee, Seungbeom Park, Jaehyeon Son, Taewan Kim, Kyungwon Yun | 2022-08-30 |
| 11275034 | Inspection apparatus and method based on coherent diffraction imaging (CDI) | Kyungwon Yun, Taewan Kim, Seungbeom Park, Jaehyeon Son, Myungjun Lee | 2022-03-15 |
| 11264256 | Wafer inspection apparatus | Gwangsik Park, Wookrae Kim, Juntaek Oh | 2022-03-01 |