Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11972960 | Imaging ellipsometry (IE)-based inspection method and method of fabricating semiconductor device by using IE-based inspection method | Myungjun Lee, Wookrae Kim, Jaehwang Jung | 2024-04-30 |
| 11624699 | Measurement system capable of adjusting AOI, AOI spread and azimuth of incident light | Jaehwang Jung, Wookrae Kim, Changhyeong YOON | 2023-04-11 |