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Batch-type apparatus for atomic layer etching (ALE), and ALE method and semiconductor device manufacturing method based on the same apparatus |
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Integrated circuit device |
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Integrated circuit semiconductor device |
Intak Jeon, Hyukwoo Kwon |
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| 12199138 |
Semiconductor device including capacitor structure and method for manufacturing the same |
Intak Jeon, Jiye BAEK |
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| 12057470 |
Semiconductor devices |
Jungmin Park, Hyungsuk Jung |
2024-08-06 |
| 11978704 |
Wiring structure and electronic device employing the same |
Changseok LEE, Hyeonjin Shin, Seongjun Park, Donghyun Im, Hyun-Ho Park +2 more |
2024-05-07 |
| 11901291 |
Semiconductor devices including lower electrodes including inner protective layer and outer protective layer |
Cheoljin Cho, Jungmin Park, Jaehyoung Choi |
2024-02-13 |
| 11784213 |
Integrated circuit device |
Jungmin Park, Haeryong KIM, Younglim Park, Cheoljin Cho |
2023-10-10 |
| 11764283 |
Semiconductor device including capacitor |
Sunmin MOON, Young-Lim Park, Kyuho Cho |
2023-09-19 |
| 11621339 |
Semiconductor device including capacitor |
Sunmin MOON, Young-Lim Park, Kyuho Cho |
2023-04-04 |
| 11114541 |
Semiconductor device including capacitor |
Sunmin MOON, Young-Lim Park, Kyuho Cho |
2021-09-07 |
| 10930654 |
Semiconductor devices |
Kijong Park, Younsoo Kim |
2021-02-23 |
| 10892345 |
Semiconductor device |
Sunmin MOON, Young-Lim Park, Kyuho Cho |
2021-01-12 |
| 9812332 |
Etching methods and methods of manufacturing semiconductor devices using the same |
Hyun-Kwan Yu, Woonki Shin, Moonhan Park, Dongsuk Shin |
2017-11-07 |
| 9685318 |
Method of forming semiconductor device |
Young-Lim Park, Wonseok Yoo, Hyokyoung Kim, Changyup Park, Kongsoo Lee +1 more |
2017-06-20 |
| 9673272 |
Semiconductor device including capacitor and method of fabricating the same |
Yunjung Choi, Se-hoon Oh, Jin Su Lee, Younsoo Kim |
2017-06-06 |
| 9337149 |
Semiconductor devices and methods of fabricating the same |
Dong-Hyun Im, Hyun-Sang Park, Soongun Lee, Chang Seok Lee, Sangwon Kim +2 more |
2016-05-10 |
| 9305928 |
Semiconductor devices having a silicon-germanium channel layer and methods of forming the same |
Youngkuk Kim, Ho Kyun An, Jaehyun Yeo, Badro Im, Sungho Jang +1 more |
2016-04-05 |
| 8698221 |
Capacitor that includes dielectric layer structure having plural metal oxides doped with different impurities |
Kiyeon Park, Insang Jeon, Yeongcheol Lee, Jun-Noh Lee |
2014-04-15 |
