Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940620 | Method of cleaning collector of EUV light source system | Changsoon Lim, Youngdo Kim, Daewon Kang, Chansoo Kang, Hoonseop KIM +3 more | 2024-03-26 |
| 11490499 | Method of exposure using extreme ultraviolet and method of manufacturing a semiconductor device using the same | Sungho Jang, Yoonjae Kim, Hyuck Shin, Kul Inn | 2022-11-01 |