| 10732129 |
Apparatus for and method of performing inspection and metrology process |
Kwang Soo Kim, Youngkyu Park, Sungho Jang |
2020-08-04 |
| 10489902 |
Inspection apparatus, semiconductor device manufacturing system including the same, and method of manufacturing a semiconductor device using the same |
Kwang Soo Kim, Sangbong Park, Youngduk Kim |
2019-11-26 |
| 10474133 |
Inspection device for inspecting wafer and method of inspecting wafer using the same |
Janghee Lee, Yoo-jin Jeong, Sangbong Park |
2019-11-12 |
| 9915623 |
Optical inspection apparatus, a method of inspecting a substrate, and a method of treating a substrate |
Kwang Soo Kim, Taejoong Kim, Yongsuk Choi, Youngduk Kim, Taeseok Oh +2 more |
2018-03-13 |
| 5883610 |
Graphics overlay device |
— |
1999-03-16 |
| 5742383 |
Apparatus for measuring degree of inclination of objective lens for optical pickup |
— |
1998-04-21 |
