Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732129 | Apparatus for and method of performing inspection and metrology process | Kwang Soo Kim, Youngkyu Park, Sungho Jang | 2020-08-04 |
| 10489902 | Inspection apparatus, semiconductor device manufacturing system including the same, and method of manufacturing a semiconductor device using the same | Kwang Soo Kim, Sangbong Park, Youngduk Kim | 2019-11-26 |
| 10474133 | Inspection device for inspecting wafer and method of inspecting wafer using the same | Janghee Lee, Yoo-jin Jeong, Sangbong Park | 2019-11-12 |
| 9915623 | Optical inspection apparatus, a method of inspecting a substrate, and a method of treating a substrate | Kwang Soo Kim, Taejoong Kim, Yongsuk Choi, Youngduk Kim, Taeseok Oh +2 more | 2018-03-13 |
| 5883610 | Graphics overlay device | — | 1999-03-16 |
| 5742383 | Apparatus for measuring degree of inclination of objective lens for optical pickup | — | 1998-04-21 |