Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12303307 | Semiconductor device measurement method using x-ray scattering and semiconductor device manufacturing method including the measurement method | Jaeyong Lee, Hidong Kwak, Minjung Shin, Chuhee LEE, Byunghyun HWANG | 2025-05-20 |
| 11988495 | Through-focus image-based metrology device, operation method thereof, and computing device for executing the operation | Kwangsoo Kim, Sungyoon Ryu, Daejun Park, Seong Jin YUN, Sujin Lee +4 more | 2024-05-21 |