Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10209627 | Systems and methods for focus-sensitive metrology targets | Myungjun Lee, Mark D. Smith, Pradeep Subrahmanyan | 2019-02-19 |
| 8911927 | Compositions and processes for immersion lithography | Michael K. Gallagher, Gerald B. Wayton, Gregory P. Prokopowicz | 2014-12-16 |
| 8428762 | Spin coating modeling | John S. Graves, Mark D. Smith | 2013-04-23 |
| 7781141 | Compositions and processes for immersion lithography | Michael K. Gallagher, Gerald B. Wayton, Gregory P. Prokopowicz | 2010-08-24 |
| 5688350 | Method of laminate manufacture | Sheila Hamilton, Roy D. Cannon, Jonathan Kennett | 1997-11-18 |