Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10216096 | Process-sensitive metrology systems and methods | Myungjun Lee, Mark D. Smith, Stilian Ivanov Pandev, Dzmitry Sanko, Pradeep Subrahmanyan +1 more | 2019-02-26 |
| 10030965 | Model-based hot spot monitoring | Stilian Ivanov Pandev, Mark D. Smith, Ady Levy | 2018-07-24 |