| 11520321 |
Measurement recipe optimization based on probabilistic domain knowledge and physical realization |
Stilian Ivanov Pandev, Dzmitry Sanko |
2022-12-06 |
| 11313809 |
Process control metrology |
Stilian Ivanov Pandev |
2022-04-26 |
| 10732516 |
Process robust overlay metrology based on optical scatterometry |
Stilian Ivanov Pandev, Andrei V. Shchegrov |
2020-08-04 |
| 10365225 |
Multi-location metrology |
Stilian Ivanov Pandev |
2019-07-30 |
| 10210606 |
Signal response metrology for image based and scatterometry overlay measurements |
Stilian Ivanov Pandev, Dzmitry Sanko, Siddharth Srivastava |
2019-02-19 |
| 10139352 |
Measurement of small box size targets |
Stilian Ivanov Pandev, Andrei V. Shchegrov, Pablo I. Rovira, Jonathan M. Madsen |
2018-11-27 |
| 7997002 |
Dual carbon nanotubes for critical dimension metrology on high aspect ratio semiconductor wafer patterns |
— |
2011-08-16 |
| 7180061 |
Method for electron beam-initiated coating for application of transmission electron microscopy |
— |
2007-02-20 |
| 7094616 |
High resolution cross-sectioning of polysilicon features with a dual beam tool |
Charles N. Archie, Chester Wasik |
2006-08-22 |
| 6881955 |
Metrology process for enhancing image contrast |
John Charles Petrus |
2005-04-19 |
| 6683305 |
Method to obtain transparent image of resist contact hole or feature by SEM without deforming the feature by ion beam |
Charles N. Archie, Chester Wasik |
2004-01-27 |
| 6456450 |
Method and apparatus for reducing track misregistration due to digital-to-analog converter quantization noise |
Roger William Wood, Mantle Man-Hon Yu |
2002-09-24 |