Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520321 | Measurement recipe optimization based on probabilistic domain knowledge and physical realization | Stilian Ivanov Pandev, Dzmitry Sanko | 2022-12-06 |
| 11313809 | Process control metrology | Stilian Ivanov Pandev | 2022-04-26 |
| 10732516 | Process robust overlay metrology based on optical scatterometry | Stilian Ivanov Pandev, Andrei V. Shchegrov | 2020-08-04 |
| 10365225 | Multi-location metrology | Stilian Ivanov Pandev | 2019-07-30 |
| 10210606 | Signal response metrology for image based and scatterometry overlay measurements | Stilian Ivanov Pandev, Dzmitry Sanko, Siddharth Srivastava | 2019-02-19 |
| 10139352 | Measurement of small box size targets | Stilian Ivanov Pandev, Andrei V. Shchegrov, Pablo I. Rovira, Jonathan M. Madsen | 2018-11-27 |
| 7997002 | Dual carbon nanotubes for critical dimension metrology on high aspect ratio semiconductor wafer patterns | — | 2011-08-16 |
| 7180061 | Method for electron beam-initiated coating for application of transmission electron microscopy | — | 2007-02-20 |
| 7094616 | High resolution cross-sectioning of polysilicon features with a dual beam tool | Charles N. Archie, Chester Wasik | 2006-08-22 |
| 6881955 | Metrology process for enhancing image contrast | John Charles Petrus | 2005-04-19 |
| 6683305 | Method to obtain transparent image of resist contact hole or feature by SEM without deforming the feature by ion beam | Charles N. Archie, Chester Wasik | 2004-01-27 |
| 6456450 | Method and apparatus for reducing track misregistration due to digital-to-analog converter quantization noise | Roger William Wood, Mantle Man-Hon Yu | 2002-09-24 |