Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7094616 | High resolution cross-sectioning of polysilicon features with a dual beam tool | Charles N. Archie, Wei Lu | 2006-08-22 |
| 6683305 | Method to obtain transparent image of resist contact hole or feature by SEM without deforming the feature by ion beam | Wei Lu, Charles N. Archie | 2004-01-27 |
| 5235626 | Segmented mask and exposure system for x-ray lithography | Alexander L. Flamholz, Robert P. Rippstein, Yuli Vladimirsky | 1993-08-10 |
| 4367044 | Situ rate and depth monitor for silicon etching | Robert M. Booth, Jr. | 1983-01-04 |
| 4293224 | Optical system and technique for unambiguous film thickness monitoring | Charles A. Gaston, Joseph P. Kirk | 1981-10-06 |