Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5268951 | X-ray beam scanning method for producing low distortion or constant distortion in x-ray proximity printing | Robert P. Rippstein, Jerome Paul Silverman, Matthew A. Thompson | 1993-12-07 |
| 5235626 | Segmented mask and exposure system for x-ray lithography | Robert P. Rippstein, Yuli Vladimirsky, Chester Wasik | 1993-08-10 |
| 4679938 | Defect detection in films on ceramic substrates | — | 1987-07-14 |
| 4637714 | Inspection system for pellicalized reticles | — | 1987-01-20 |