| 6842237 |
Phase shifted test pattern for monitoring focus and aberrations in optical projection systems |
Christopher P. Ausschnitt, Timothy A. Brunner, Nakgeuon Seong |
2005-01-11 |
| 6606151 |
Grating patterns and method for determination of azimuthal and radial aberration |
Gerhard Kunkel, Shahid Butt |
2003-08-12 |
| 6091486 |
Blazed grating measurements of lithographic lens aberrations |
— |
2000-07-18 |
| 6048651 |
Fresnel zone mask for pupilgram |
Timothy A. Brunner, Christopher J. Progler |
2000-04-11 |
| 5898498 |
Point interferometer to measure phase shift in reticles |
— |
1999-04-27 |
| 5808731 |
System and method for visually determining the performance of a photolithography system |
— |
1998-09-15 |
| 5663785 |
Diffraction pupil filler modified illuminator for annular pupil fills |
Ronald M. Martino |
1997-09-02 |
| T102104 |
Scanning optical system adapted for linewidth measurement in semiconductor devices |
Josef Predatsch, Lo-Soun Su |
1982-08-03 |
| 4293224 |
Optical system and technique for unambiguous film thickness monitoring |
Charles A. Gaston, Chester Wasik |
1981-10-06 |
| 4260259 |
Metal etch rate analyzer |
— |
1981-04-07 |
