Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6184151 | Method for forming cornered images on a substrate and photomask formed thereby | William J. Adair, Richard A. Ferguson, Mark C. Hakey, Steven J. Holmes, David V. Horak +3 more | 2001-02-06 |
| 5959325 | Method for forming cornered images on a substrate and photomask formed thereby | William J. Adair, Richard A. Ferguson, Mark C. Hakey, Steven J. Holmes, David V. Horak +3 more | 1999-09-28 |
| 5663785 | Diffraction pupil filler modified illuminator for annular pupil fills | Joseph P. Kirk | 1997-09-02 |
| 5657235 | Continuous scale optical proximity correction by mask maker dose modulation | Lars Liebmann, J. Weed | 1997-08-12 |
| 5538833 | High resolution phase edge lithography without the need for a trim mask | Richard A. Ferguson, Lars Liebmann, Thomas H. Newman | 1996-07-23 |