Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6880135 | Method of incorporating lens aberration information into various process flows | Fang-Cheng Chang, Christophe Pierrat | 2005-04-12 | $25,811,000 |
| 6658640 | Simulation-based feed forward process control | — | 2003-12-02 | |
| 5657235 | Continuous scale optical proximity correction by mask maker dose modulation | Lars Liebmann, Ronald M. Martino | 1997-08-12 | $28,856,000 |