Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| T102104 | Scanning optical system adapted for linewidth measurement in semiconductor devices | Joseph P. Kirk, Josef Predatsch | 1982-08-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| T102104 | Scanning optical system adapted for linewidth measurement in semiconductor devices | Joseph P. Kirk, Josef Predatsch | 1982-08-03 |