| 12209854 |
Methods and systems for measurement of tilt and overlay of a structure |
Stilian Ivanov Pandev |
2025-01-28 |
| 12181271 |
Estimating in-die overlay with tool induced shift correction |
Stilian Ivanov Pandev, Dimitry Sanko |
2024-12-31 |
| 12148639 |
Correcting target locations for temperature in semiconductor applications |
Phalguna Kumar Rachinayani, Jean-Christophe Perrin, Stilian Ivanov Pandev |
2024-11-19 |
| 11880142 |
Self-calibrating overlay metrology |
Stilian Ivanov Pandev, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko, Liran Yerushalmi +2 more |
2024-01-23 |
| 11604063 |
Self-calibrated overlay metrology using a skew training sample |
Stilian Ivanov Pandev, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko, Liran Yerushalmi +2 more |
2023-03-14 |
| 11604420 |
Self-calibrating overlay metrology |
Stilian Ivanov Pandev, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko, Liran Yerushalmi +2 more |
2023-03-14 |
| 11530913 |
Methods and systems for determining quality of semiconductor measurements |
Dzmitry Sanko, Stilian Ivanov Pandev |
2022-12-20 |