Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Correcting target locations for temperature in semiconductor applications

Correcting target locations for temperature in semiconductor applications

US Patent 12148639 · Granted Nov 19, 2024

Estimated economic value: $726,495,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor measurements with robust in-line tool matching2025
Dynamic control of machine learning based measurement recipe optimization2025
Imaging reflectometry for inline screening2025
Methods and systems for measurement of tilt and overlay of a structure2025
Methods and systems for measurement of tilt and overlay of a structure2025
Estimating in-die overlay with tool induced shift correction2024
Estimating in-die overlay with tool induced shift correction2024
Self-calibrating overlay metrology2024
Self-calibrating overlay metrology2024
Bandgap measurements of patterned film stacks using spectroscopic metrology2023
Measurement of overlay error using device inspection system2023
Tomography based semiconductor measurements using simplified models2023