Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Signal response metrology for image based and scatterometry overlay measurements

Signal response metrology for image based and scatterometry overlay measurements

US Patent 10210606 · Granted Feb 19, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Rapid drought monitoring and identification method for winter wheat based on UAV2025
Semiconductor measurements with robust in-line tool matching2025
Dynamic control of machine learning based measurement recipe optimization2025
Imaging reflectometry for inline screening2025
Smile designer2025
Methods and systems for measurement of tilt and overlay of a structure2025
Estimating in-die overlay with tool induced shift correction2024
Correcting target locations for temperature in semiconductor applications2024
Smile designer2024
Self-calibrating overlay metrology2024
Bandgap measurements of patterned film stacks using spectroscopic metrology2023
Measurement of overlay error using device inspection system2023