Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9780004 | Methods and apparatus for optimization of inspection speed by generation of stage speed profile and selection of care areas for automated wafer inspection | — | 2017-10-03 |
| 8664594 | Electron-optical system for high-speed and high-sensitivity inspections | Xinrong Jiang, Liqun Han, Mohammed Tahmassebpur, Salam Harb | 2014-03-04 |
| 8362425 | Multiple-beam system for high-speed electron-beam inspection | Liqun Han, Xinrong Jiang | 2013-01-29 |
| 8294125 | High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture | Liqun Han, Marian Mankos, Xinrong Jiang, Rex Runyon | 2012-10-23 |
| 7253410 | Charge-control pre-scanning for e-beam imaging | Kirk J. Bertsche | 2007-08-07 |
| 7012683 | Apparatus and methods for optically inspecting a sample for anomalies | Ralph C. Wolf, Eva L. Benitez, Dongsheng (Don) Chen, Jamie M. Sullivan, Eric Vella +1 more | 2006-03-14 |
| 6833913 | Apparatus and methods for optically inspecting a sample for anomalies | Ralph C. Wolf, Eva L. Benitez, Dongsheng Chen, Jamie M. Sullivan, Eric Vella +1 more | 2004-12-21 |
| RE37740 | Method and apparatus for optical inspection of substrates | Curt H. Chadwick, Robert R. Sholes, Francis D. Tucker, III, Michael E. Fein, P. C. Jann +2 more | 2002-06-11 |
| 5502306 | Electron beam inspection system and method | Dan Meisburger, Alan D. Brodie, Curt H. Chadwick, Anil Desai, Hans-Peter Dohse +28 more | 1996-03-26 |
| 5131755 | Automatic high speed optical inspection system | Curt H. Chadwick, Robert R. Sholes, Francis D. Tucker, III, Michael E. Fein, P. C. Jann +2 more | 1992-07-21 |
| 5085517 | Automatic high speed optical inspection system | Curt H. Chadwick, Robert R. Sholes, Francis D. Tucker, III, Michael E. Fein, P. C. Jann +5 more | 1992-02-04 |
| 4877326 | Method and apparatus for optical inspection of substrates | Curt H. Chadwick, Robert R. Sholes, Francis D. Tucker, III, Michael E. Fein, P. C. Jann +2 more | 1989-10-31 |