Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753947 | Lithography system and method for device manufacture | David A. Markle | 2004-06-22 |
| 6556279 | Motion compensation system and method for lithography | David A. Markle | 2003-04-29 |
| 5717204 | Inspecting optical masks with electron beam microscopy | Alan D. Brodie, Zhong-Wei Chen, Jack Jau | 1998-02-10 |
| 5665968 | Inspecting optical masks with electron beam microscopy | Alan D. Brodie, Zhong-Wei Chen, Jack Jau, Brian J. Grenon | 1997-09-09 |
| 5502306 | Electron beam inspection system and method | Alan D. Brodie, Curt H. Chadwick, Anil Desai, Hans-Peter Dohse, Dennis G. Emge +28 more | 1996-03-26 |