DM

Dan Meisburger

KI Kla Instruments: 3 patents #10 of 99Top 15%
US Ultratech Stepper: 2 patents #14 of 40Top 35%
Overall (All Time): #1,039,896 of 4,157,543Top 30%
5
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6753947 Lithography system and method for device manufacture David A. Markle 2004-06-22
6556279 Motion compensation system and method for lithography David A. Markle 2003-04-29
5717204 Inspecting optical masks with electron beam microscopy Alan D. Brodie, Zhong-Wei Chen, Jack Jau 1998-02-10
5665968 Inspecting optical masks with electron beam microscopy Alan D. Brodie, Zhong-Wei Chen, Jack Jau, Brian J. Grenon 1997-09-09
5502306 Electron beam inspection system and method Alan D. Brodie, Curt H. Chadwick, Anil Desai, Hans-Peter Dohse, Dennis G. Emge +28 more 1996-03-26