| 11880971 |
Inspection method and system |
Wei Fang, Zhao-Li Zhang |
2024-01-23 |
$126,669,000 |
| 11430631 |
Methods of inspecting samples with multiple beams of charged particles |
Kuo-Shih Liu, Xuedong Liu, Wei Fang |
2022-08-30 |
$42,848,000 |
| 11250559 |
Inspection method and system |
Wei Fang, Zhao-Li Zhang |
2022-02-15 |
$79,085,000 |
| 11217423 |
Apparatus of plural charged-particle beams |
Weiming Ren, Shuai Li, Xuedong Liu, Zhongwei Chen |
2022-01-04 |
$116,419,000 |
| 11043356 |
Local alignment point calibration method in die inspection |
Wei Fang, Kevin Liu, Fei Wang, Zhaohui Guo |
2021-06-22 |
$64,465,000 |
| 10679340 |
Inspection method and system |
Wei Fang, Zhao-Li Zhang |
2020-06-09 |
$19,813,000 |
| 10586681 |
Charged particle beam apparatus |
Zhongwei Chen, Weiming Ren |
2020-03-10 |
$12,446,000 |
| 10497538 |
Local alignment point calibration method in die inspection |
Wei Fang, Kevin Liu, Fei Wang, Zhaohui Guo |
2019-12-03 |
|
| 10380731 |
Method and system for fast inspecting defects |
Wei Fang |
2019-08-13 |
|
| 10236156 |
Apparatus of plural charged-particle beams |
Weiming Ren, Shuai Li, Xuedong Liu, Zhongwei Chen |
2019-03-19 |
|
| 10102619 |
Inspection method and system |
Wei Fang, Zhao-Li Zhang |
2018-10-16 |
|
| 10020164 |
Charged particle beam apparatus |
Zhongwei Chen, Weiming Ren |
2018-07-10 |
|
| 9965844 |
Inspection method and system |
Wei Fang, Zhao-Li Zhang |
2018-05-08 |
|
| 9953803 |
Local alignment point calibration method in die inspection |
Wei Fang, Kevin Liu, Fei Wang |
2018-04-24 |
|
| 9541824 |
Method and system for fast inspecting defects |
Wei Fang |
2017-01-10 |
|
| 9494856 |
Method and system for fast inspecting defects |
Wei Fang |
2016-11-15 |
|
| 9436988 |
Method and system of classifying defects on a wafer |
Wei Fang, Zhaoli Zhang |
2016-09-06 |
|
| 9400176 |
Dynamic focus adjustment with optical height detection apparatus in electron beam system |
Joe Wang, Van-Duc Nguyen, Yi Wang, Zhong-Wei Chen |
2016-07-26 |
|
| 9362087 |
Charged particle beam apparatus |
Zhongwei Chen, Weiming Ren |
2016-06-07 |
|
| 9282293 |
Method and system for measuring critical dimension and monitoring fabrication uniformity |
Wei Fang, Hong Xiao |
2016-03-08 |
|
| 9190241 |
Charged particle beam apparatus |
Zhongwei Chen, Weiming Ren |
2015-11-17 |
|
| 9177758 |
Charged particle beam apparatus |
Zhongwei Chen, Weiming Ren, Chiyan Kuan, Yixiang Wang, Xiaoli Guo +1 more |
2015-11-03 |
|
| 9100553 |
Method and system for measuring critical dimension and monitoring fabrication uniformity |
Wei Fang, Hong Xiao |
2015-08-04 |
|
| 9041795 |
Method and system for measuring critical dimension and monitoring fabrication uniformity |
Wei Fang, Hong Xiao |
2015-05-26 |
|
| 9035674 |
Structure and method for determining a defect in integrated circuit manufacturing process |
Hong Xiao, Chang-Chun Yeh |
2015-05-19 |
|
