Issued Patents All Time
Showing 25 most recent of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11880971 | Inspection method and system | Wei Fang, Zhao-Li Zhang | 2024-01-23 |
| 11430631 | Methods of inspecting samples with multiple beams of charged particles | Kuo-Shih Liu, Xuedong Liu, Wei Fang | 2022-08-30 |
| 11250559 | Inspection method and system | Wei Fang, Zhao-Li Zhang | 2022-02-15 |
| 11217423 | Apparatus of plural charged-particle beams | Weiming Ren, Shuai Li, Xuedong Liu, Zhongwei Chen | 2022-01-04 |
| 11043356 | Local alignment point calibration method in die inspection | Wei Fang, Kevin Liu, Fei Wang, Zhaohui Guo | 2021-06-22 |
| 10679340 | Inspection method and system | Wei Fang, Zhao-Li Zhang | 2020-06-09 |
| 10586681 | Charged particle beam apparatus | Zhongwei Chen, Weiming Ren | 2020-03-10 |
| 10497538 | Local alignment point calibration method in die inspection | Wei Fang, Kevin Liu, Fei Wang, Zhaohui Guo | 2019-12-03 |
| 10380731 | Method and system for fast inspecting defects | Wei Fang | 2019-08-13 |
| 10236156 | Apparatus of plural charged-particle beams | Weiming Ren, Shuai Li, Xuedong Liu, Zhongwei Chen | 2019-03-19 |
| 10102619 | Inspection method and system | Wei Fang, Zhao-Li Zhang | 2018-10-16 |
| 10020164 | Charged particle beam apparatus | Zhongwei Chen, Weiming Ren | 2018-07-10 |
| 9965844 | Inspection method and system | Wei Fang, Zhao-Li Zhang | 2018-05-08 |
| 9953803 | Local alignment point calibration method in die inspection | Wei Fang, Kevin Liu, Fei Wang | 2018-04-24 |
| 9541824 | Method and system for fast inspecting defects | Wei Fang | 2017-01-10 |
| 9494856 | Method and system for fast inspecting defects | Wei Fang | 2016-11-15 |
| 9436988 | Method and system of classifying defects on a wafer | Wei Fang, Zhaoli Zhang | 2016-09-06 |
| 9400176 | Dynamic focus adjustment with optical height detection apparatus in electron beam system | Joe Wang, Van-Duc Nguyen, Yi Wang, Zhong-Wei Chen | 2016-07-26 |
| 9362087 | Charged particle beam apparatus | Zhongwei Chen, Weiming Ren | 2016-06-07 |
| 9282293 | Method and system for measuring critical dimension and monitoring fabrication uniformity | Wei Fang, Hong Xiao | 2016-03-08 |
| 9190241 | Charged particle beam apparatus | Zhongwei Chen, Weiming Ren | 2015-11-17 |
| 9177758 | Charged particle beam apparatus | Zhongwei Chen, Weiming Ren, Chiyan Kuan, Yixiang Wang, Xiaoli Guo +1 more | 2015-11-03 |
| 9100553 | Method and system for measuring critical dimension and monitoring fabrication uniformity | Wei Fang, Hong Xiao | 2015-08-04 |
| 9041795 | Method and system for measuring critical dimension and monitoring fabrication uniformity | Wei Fang, Hong Xiao | 2015-05-26 |
| 9035674 | Structure and method for determining a defect in integrated circuit manufacturing process | Hong Xiao, Chang-Chun Yeh | 2015-05-19 |