Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815345 | Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing | Yan Zhao, Chang-Chun Yeh, Zhongwei Chen | 2004-11-09 |
| 6710342 | Method and apparatus for scanning semiconductor wafers using a scanning electron microscope | Zhong-Wei Chen | 2004-03-23 |
| 5717204 | Inspecting optical masks with electron beam microscopy | Dan Meisburger, Alan D. Brodie, Zhong-Wei Chen | 1998-02-10 |
| 5665968 | Inspecting optical masks with electron beam microscopy | Dan Meisburger, Alan D. Brodie, Zhong-Wei Chen, Brian J. Grenon | 1997-09-09 |
| 5502306 | Electron beam inspection system and method | Dan Meisburger, Alan D. Brodie, Curt H. Chadwick, Anil Desai, Hans-Peter Dohse +28 more | 1996-03-26 |