Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10409154 | Method and apparatus for pellicle removal | James Boyette, Alexander M. Figliolini | 2019-09-10 |
| 9958771 | Method and apparatus for pellicle removal | James Boyette, Alexander M. Figliolini | 2018-05-01 |
| 7604906 | Films for prevention of crystal growth on fused silica substrates for semiconductor lithography | William Volk, Ben Eynon | 2009-10-20 |
| 6190836 | Methods for repair of photomasks | Richard A. Haight, Dennis M. Hayden, Michael S. Hibbs, J. Peter Levin, Timothy E. Neary +4 more | 2001-02-20 |
| 6165649 | Methods for repair of photomasks | Richard A. Haight, Dennis M. Hayden, Michael S. Hibbs, J. Peter Levin, Timothy E. Neary +4 more | 2000-12-26 |
| 6156461 | Method for repair of photomasks | Richard A. Haight, Dennis M. Hayden, Michael S. Hibbs, J. Peter Levin, Timothy E. Neary +4 more | 2000-12-05 |
| 6090507 | Methods for repair of photomasks | Richard A. Haight, Dennis M. Hayden, Michael S. Hibbs, J. Peter Levin, Timothy E. Neary +4 more | 2000-07-18 |
| 5978501 | Adaptive inspection method and system | Karen Badger, David S. O'Grady, Jacek G. Smolinski | 1999-11-02 |
| 5665968 | Inspecting optical masks with electron beam microscopy | Dan Meisburger, Alan D. Brodie, Zhong-Wei Chen, Jack Jau | 1997-09-09 |