| 6277527 |
Method of making a twin alternating phase shift mask |
Lars Liebmann |
2001-08-21 |
| 6165651 |
Apparatus for tuning an attenuating phase shift mask |
William J. Adair, Song Peng |
2000-12-26 |
| 6110623 |
Surface coating method to highlight transparent mask defects |
Denis Rigaill |
2000-08-29 |
| 6110624 |
Multiple polarity mask exposure method |
Michael S. Hibbs, Timothy E. Neary, Denis Rigaill |
2000-08-29 |
| 6027837 |
Method for tuning an attenuating phase shift mask |
William J. Adair, Song Peng |
2000-02-22 |
| 5978501 |
Adaptive inspection method and system |
Karen Badger, Brian J. Grenon, Jacek G. Smolinski |
1999-11-02 |
| 5932377 |
Exact transmission balanced alternating phase-shifting mask for photolithography |
Richard A. Ferguson, Lars Liebmann, Scott M. Mansfield, Alfred Wong |
1999-08-03 |
| 5807649 |
Lithographic patterning method and mask set therefor with light field trim mask |
Lars Liebmann, Richard A. Ferguson, William J. Adair |
1998-09-15 |
| 5506080 |
Lithographic mask repair and fabrication method |
William J. Adair, Willam C. Joyce, James J. Lynch, Jean T. Ohlson |
1996-04-09 |
| 5503951 |
Attenuating phase-shift mask structure and fabrication method |
Steven Flanders |
1996-04-02 |
| 5484672 |
Method of making a rim-type phase-shift mask |
Stanislav P. Bajuk, Edward T. Smith |
1996-01-16 |
