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Methods and systems for inspection of wafers and reticles using designer intent data |
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Method of inducing micro-seismic fractures and dislocations of fractures |
— |
2018-04-24 |
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Methods and systems for inspection of wafers and reticles using designer intent data |
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— |
2013-07-30 |
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Computer-implemented methods and systems for determining different process windows for a wafer printing process for different reticle designs |
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Films for prevention of crystal growth on fused silica substrates for semiconductor lithography |
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Use of calcium fluoride substrate for lithography masks |
Laurence Wagner |
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