Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6582857 | Repair of masks to promote adhesion of patches | Philip Flanigan, Michael S. Hibbs, Timothy E. Neary | 2003-06-24 |
| 6534225 | Tapered ion implantation with femtosecond laser ablation to remove printable alternating phase shift features | Steven Flanders, Timothy E. Neary | 2003-03-18 |
| 6515736 | Reticle capturing and handling system | Timothy E. Neary | 2003-02-04 |
| 6346352 | Quartz defect removal utilizing gallium staining and femtosecond ablation | Timothy E. Neary, John N. Ross | 2002-02-12 |
| 6190836 | Methods for repair of photomasks | Brian J. Grenon, Richard A. Haight, Michael S. Hibbs, J. Peter Levin, Timothy E. Neary +4 more | 2001-02-20 |
| 6165649 | Methods for repair of photomasks | Brian J. Grenon, Richard A. Haight, Michael S. Hibbs, J. Peter Levin, Timothy E. Neary +4 more | 2000-12-26 |
| 6156461 | Method for repair of photomasks | Brian J. Grenon, Richard A. Haight, Michael S. Hibbs, J. Peter Levin, Timothy E. Neary +4 more | 2000-12-05 |
| 6090507 | Methods for repair of photomasks | Brian J. Grenon, Richard A. Haight, Michael S. Hibbs, J. Peter Levin, Timothy E. Neary +4 more | 2000-07-18 |