Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6791095 | Method and system of using a scanning electron microscope in semiconductor wafer inspection with Z-stage focus | Chung-Shih Pan, Yi Wang | 2004-09-14 |
| 5578821 | Electron beam inspection system and method | Dan Meisberger, Alan D. Brodie, Dennis G. Emge, Zhong-Wei Chen, Richard R. Simmons +7 more | 1996-11-26 |
| 5502306 | Electron beam inspection system and method | Dan Meisburger, Alan D. Brodie, Curt H. Chadwick, Hans-Peter Dohse, Dennis G. Emge +28 more | 1996-03-26 |
| 4647764 | Rotational and focusing apparatus for turret mounted lenses | Curt H. Chadwick | 1987-03-03 |
| 4604910 | Apparatus for accurately positioning an object at each of two locations | Curt H. Chadwick | 1986-08-12 |