| RE37740 |
Method and apparatus for optical inspection of substrates |
Robert R. Sholes, John D. Greene, Francis D. Tucker, III, Michael E. Fein, P. C. Jann +2 more |
2002-06-11 |
| 6141038 |
Alignment correction prior to image sampling in inspection systems |
Scott A. Young, Roger Kroeze, Nicholas Szabo, Kent Douglas, Fred Babian |
2000-10-31 |
| 5502306 |
Electron beam inspection system and method |
Dan Meisburger, Alan D. Brodie, Anil Desai, Hans-Peter Dohse, Dennis G. Emge +28 more |
1996-03-26 |
| 5131755 |
Automatic high speed optical inspection system |
Robert R. Sholes, John D. Greene, Francis D. Tucker, III, Michael E. Fein, P. C. Jann +2 more |
1992-07-21 |
| 5085517 |
Automatic high speed optical inspection system |
Robert R. Sholes, John D. Greene, Francis D. Tucker, III, Michael E. Fein, P. C. Jann +5 more |
1992-02-04 |
| 5014627 |
Stable instrument bench with replicated precision surface |
Larry Rosenberg, Alex Brudny |
1991-05-14 |
| 4889676 |
Method of molding a precision surface on an instrument table |
Larry Rosenberg, Alex Brudny |
1989-12-26 |
| 4877326 |
Method and apparatus for optical inspection of substrates |
Robert R. Sholes, John D. Greene, Francis D. Tucker, III, Michael E. Fein, P. C. Jann +2 more |
1989-10-31 |
| 4647764 |
Rotational and focusing apparatus for turret mounted lenses |
Anil Desai |
1987-03-03 |
| 4639587 |
Automatic focusing system for a microscope |
Art Shulenberger, John S. Taylor, Richard R. Simmons |
1987-01-27 |
| 4618938 |
Method and apparatus for automatic wafer inspection |
Paul Sandland, Russell M. Singleton, Howard Dwyer |
1986-10-21 |
| 4604910 |
Apparatus for accurately positioning an object at each of two locations |
Anil Desai |
1986-08-12 |
| 4556317 |
X-Y Stage for a patterned wafer automatic inspection system |
Paul Sandland, Howard Dwyer |
1985-12-03 |
| 4199735 |
Optical compensation for thermal lensing in conductively cooled laser rod |
Edward D. Reed |
1980-04-22 |
| 4183483 |
Translating mechanism |
John E. Raffarin |
1980-01-15 |
| 4181900 |
Laser pumping assembly |
Joseph D. Tajnai, Dan J. Radecki |
1980-01-01 |