| 11662323 |
Method and system for inspecting an EUV mask |
Guochong Weng, Youjin Wang, Chiyan Kuan |
2023-05-30 |
| 10775325 |
Method and system for inspecting an EUV mask |
Guochong Weng, Youjin Wang, Chiyan Kuan |
2020-09-15 |
| 10088438 |
Method and system for inspecting an EUV mask |
Guochong Weng, Youjin Wang, Chiyan Kuan |
2018-10-02 |
| 10054556 |
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask |
You-Jin Wang, Chiyan Kuan |
2018-08-21 |
| 9859089 |
Method and system for inspecting and grounding an EUV mask |
Guochong Weng, Youjin Wang, Chiyan Kuan |
2018-01-02 |
| 9572237 |
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask |
You-Jin Wang, Chiyan Kuan |
2017-02-14 |
| 9485846 |
Method and system for inspecting an EUV mask |
Guochong Weng, Youjin Wang, Chiyan Kuan |
2016-11-01 |
| 9460887 |
Discharging method for charged particle beam imaging |
You-Jin Wang |
2016-10-04 |
| 9164399 |
Reticle operation system |
Youjin Wang, Chiyan Kuan |
2015-10-20 |
| 9113538 |
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask |
You-Jin Wang, Chiyan Kuan |
2015-08-18 |
| 8604428 |
Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system |
You-Jin Wang |
2013-12-10 |
| 8575573 |
Structure for discharging extreme ultraviolet mask |
You-Jin Wang, Chiyan Kuan |
2013-11-05 |
| 8519333 |
Charged particle system for reticle/wafer defects inspection and review |
Chiyan Kuan, Yi Wang, Zhonghua Dong, Zhongwei Chen |
2013-08-27 |
| 8110818 |
Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system |
You-Jin Wang |
2012-02-07 |
| 8094924 |
E-beam defect review system |
Jack Jau, Zhongwei Chen, Yi Wang, Joe Wang, Xuedong Liu +2 more |
2012-01-10 |
| 8031344 |
Z-stage configuration and application thereof |
You-Jin Wang |
2011-10-04 |
| 7868303 |
Method and handling apparatus for placing patterning device on support member for charged particle beam imaging |
You-Jin Wang, Hsuan-Bin Huang |
2011-01-11 |
| 7838848 |
Patterning device holding apparatus and application thereof |
Hsuan-Bin Huang, You-Jin Wang |
2010-11-23 |
| 6791095 |
Method and system of using a scanning electron microscope in semiconductor wafer inspection with Z-stage focus |
Yi Wang, Anil Desai |
2004-09-14 |
| 5502306 |
Electron beam inspection system and method |
Dan Meisburger, Alan D. Brodie, Curt H. Chadwick, Anil Desai, Hans-Peter Dohse +28 more |
1996-03-26 |