Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662323 | Method and system for inspecting an EUV mask | Guochong Weng, Chiyan Kuan, Chung-Shih Pan | 2023-05-30 |
| 10775325 | Method and system for inspecting an EUV mask | Guochong Weng, Chiyan Kuan, Chung-Shih Pan | 2020-09-15 |
| 10643818 | Load lock system for charged particle beam imaging | Hsuan-Bin Huang, Chun Lu, Chin-Fa Tu, Wen-Sheng Lin | 2020-05-05 |
| 10088438 | Method and system for inspecting an EUV mask | Guochong Weng, Chiyan Kuan, Chung-Shih Pan | 2018-10-02 |
| 9859089 | Method and system for inspecting and grounding an EUV mask | Guochong Weng, Chiyan Kuan, Chung-Shih Pan | 2018-01-02 |
| 9485846 | Method and system for inspecting an EUV mask | Guochong Weng, Chiyan Kuan, Chung-Shih Pan | 2016-11-01 |
| 9164399 | Reticle operation system | Chiyan Kuan, Chung-Shih Pan | 2015-10-20 |